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Solvent implant resist strip

January The thermo-mechanical properties and the tensile behaviour of modified LDPE samples by radiation cross-linking were measured at the ambient temperature and after temperature load. Xu, Y. Croisy et al.
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Characterization and Development of High Dose Implanted Resist Stripping Processes

Solvent implant resist strip
Solvent implant resist strip
Solvent implant resist strip
Solvent implant resist strip
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Non-Oxidizing Solvent-Based Strip of Ion Implanted Photoresist

In this work, the effect of implantation parameters energy and implanted specie on the photoresist modifications are studied and several plasma chemistries are evaluated to remove it. Vanstreels, T. Edited by:. Authors: Ke Ping Han, S. Yoon , E. Online since:. Mannaert, M.
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Non-Oxidizing Solvent-Based Strip of Ion Implanted Photoresist

Arnauts, I. Houssa, G. Related Articles.
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